Fabrication of high-performance GaAs/AlGaAs optical phase modulators for microwave/photonic integrated circuits

Stanley H. Kravitz; G. Allen Vawter; Vincent M. Hietala; Morris Burt Snipes Jr.; Marcelino G. Armendariz; Richard Franklin Carson; B. Eugene Hammons; Ronald E. Leibenguth

doi:10.1117/12.177393

10 June 1994 Fabrication of high-performance GaAs/AlGaAs optical phase modulators for microwave/photonic integrated circuits

Stanley H. Kravitz, G. Allen Vawter, Vincent M. Hietala, Morris Burt Snipes Jr., Marcelino G. Armendariz, Richard Franklin Carson, B. Eugene Hammons, Ronald E. Leibenguth

Author Affiliations +

Proceedings Volume 2155, Optoelectronic Signal Processing for Phased-Array Antennas IV; (1994) https://doi.org/10.1117/12.177393
Event: OE/LASE '94, 1994, Los Angeles, CA, United States

Abstract

A high-speed distributed electrode phase modulator has been designed and fabricated. The processing of this device presented many challenges: (1) smooth rib waveguides etched to an accuracy of +/- 200angstroms; (2) polyimide planarization of 5micrometers step heights, with vias patterned as small as 1.6 micrometers ; (3) contact metalization with resistivities as low as 1 X 10^-6(Omega) -cm²; (4) coplanar n and p gold contacts 2.5 micrometers thick, with a 0.5 micrometers gap between contacts; (5) ion- implantation to achieve both electrical and optical isolation. A brief description of how each of these processes have been accomplished will be presented. The epitaxial growth structure of this device will be discussed, including SEM cross-sections of the completed device.

Citation Download Citation

Stanley H. Kravitz, G. Allen Vawter, Vincent M. Hietala, Morris Burt Snipes Jr., Marcelino G. Armendariz, Richard Franklin Carson, B. Eugene Hammons, and Ronald E. Leibenguth "Fabrication of high-performance GaAs/AlGaAs optical phase modulators for microwave/photonic integrated circuits", Proc. SPIE 2155, Optoelectronic Signal Processing for Phased-Array Antennas IV, (10 June 1994); https://doi.org/10.1117/12.177393

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