Microlithography of pi-conjugated polymers

Mohammad S. A. Abdou; Z. W. Xie; J. Lowe; Steven Holdcroft

doi:10.1117/12.175388

16 May 1994 Microlithography of π-conjugated polymers

Mohammad S. A. Abdou, Z. W. Xie, J. Lowe, Steven Holdcroft

Proceedings Volume 2195, Advances in Resist Technology and Processing XI; (1994) https://doi.org/10.1117/12.175388
Event: SPIE's 1994 Symposium on Microlithography, 1994, San Jose, CA, United States

Abstract

In this work the photochemistry and photoimaging of derivatized polythiophenes will be described. Poly(3-alkylthiophenes) are inherently photolabile. One of the photochemical products leads to cross-linking, which can be utilized in photolithography. During this process, (pi) -conjugation remains virtually intact, and conductivities remain the same as the pristine polymer. The photosensitivity of this polymer to cross-linking, and thereby, insolubilization, can be enhanced by copolymerization with thienyl moieties possessing the methacryoyl functionality. In addition to photoimaging, the stability of the conducting state will be discussed. Strategies for enhancing stabilization will be addressed with a view to assimilating organic wires into integrated circuitry.

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Mohammad S. A. Abdou, Z. W. Xie, J. Lowe, and Steven Holdcroft "Microlithography of π-conjugated polymers", Proc. SPIE 2195, Advances in Resist Technology and Processing XI, (16 May 1994); https://doi.org/10.1117/12.175388

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