New microoptical devices based on micromechanics

Rainer Riesenberg; Johann Michael Koehler; Horst Porwol

doi:10.1117/12.180985

28 July 1994 New microoptical devices based on micromechanics

Rainer Riesenberg, Johann Michael Koehler, Horst Porwol

Proceedings Volume 2213, Nanofabrication Technologies and Device Integration; (1994) https://doi.org/10.1117/12.180985
Event: Integrated Optoelectronics '94, 1994, Lindau, Germany

Abstract

New micro-optical devices are presented: a modulated thermal IR source and an electrical controllable micromirror for image formation with an adjustable focal length ranging from (infinity) down to 0.001 m. These integrable thermo-optical devices base on micromechanics and thin film technology. Device fabrication, the physical background, properties, advantages, limitations, especially size effects, and experimental examples are given.

Citation Download Citation

Rainer Riesenberg, Johann Michael Koehler, and Horst Porwol "New microoptical devices based on micromechanics", Proc. SPIE 2213, Nanofabrication Technologies and Device Integration, (28 July 1994); https://doi.org/10.1117/12.180985

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