Computer-controlled high accuracy optical measurement

Michael Schulz

doi:10.1117/12.194341

15 November 1994 Computer-controlled high-accuracy optical measurement

Michael Schulz

Proceedings Volume 2248, Optical Measurements and Sensors for the Process Industries; (1994) https://doi.org/10.1117/12.194341
Event: Optics for Productivity in Manufacturing, 1994, Frankfurt, Germany

Abstract

In measurements which are influenced by external parameters, computer control and automation can help to improve the accuracy. This is also true of basically optical measurement set-ups such as certain interferometers for measuring flatness or wavefront aberrations, or set-ups for measuring the optical transfer function of lenses, for example. For the latter, a critical external parameter is the temperature variation resulting in expansion and therefore defocusing effects. New developments and measurement principles leading to improved accuracy are discussed.

Citation Download Citation

Michael Schulz "Computer-controlled high-accuracy optical measurement", Proc. SPIE 2248, Optical Measurements and Sensors for the Process Industries, (15 November 1994); https://doi.org/10.1117/12.194341

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