Submodule for the laser vacuum projection lithography

Eduard I. Tochitsky; A. V. Baranov; Victor V. Boksha; Vyjacheslav E. Obukhov; Anatoly I. Sharendo; Y. I. Tochitsky; Victor Adamovich Azarko; V. Lopatko

doi:10.1117/12.186792

16 September 1994 Submodule for the laser vacuum projection lithography

Eduard I. Tochitsky, A. V. Baranov, Victor V. Boksha, Vyjacheslav E. Obukhov, Anatoly I. Sharendo, Y. I. Tochitsky, Victor Adamovich Azarko, V. Lopatko

Author Affiliations +

Proceedings Volume 2336, Manufacturing Process Control for Microelectronic Devices and Circuits; (1994) https://doi.org/10.1117/12.186792
Event: Microelectronic Manufacturing, 1994, Austin, TX, United States

Abstract

The present paper gives the results of investigations of the process of the laser vacuum projection lithography (LVPL) and design of a laser projection stepper, ensuring practical implementation of the proposed process. The LVPL principles, fields of application are discussed, the LVPL EM-5094 submodule specifications are given and its test results are provided.

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Eduard I. Tochitsky, A. V. Baranov, Victor V. Boksha, Vyjacheslav E. Obukhov, Anatoly I. Sharendo, Y. I. Tochitsky, Victor Adamovich Azarko, and V. Lopatko "Submodule for the laser vacuum projection lithography", Proc. SPIE 2336, Manufacturing Process Control for Microelectronic Devices and Circuits, (16 September 1994); https://doi.org/10.1117/12.186792

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