High-temperature optical fiber displacement sensors for intelligent process monitoring of multilayer ceramic actuators

Michael F. Gunther; Richard O. Claus; Tuan A. Tran; Jonathan A. Greene

doi:10.1117/12.184971

14 September 1994 High-temperature optical fiber displacement sensors for intelligent process monitoring of multilayer ceramic actuators

Michael F. Gunther, Richard O. Claus, Tuan A. Tran, Jonathan A. Greene

Author Affiliations +

Proceedings Volume 2360, Tenth International Conference on Optical Fibre Sensors; (1994) https://doi.org/10.1117/12.184971
Event: 10th Optical Fibre Sensors Conference, 1994, Glasgow, United Kingdom

Abstract

Multilayer ceramic actuators (MCAs) are of interest for u in actuated materials because of their small hysterisis, small size, and durability, and the relatively large range of displacements made possible by their multilayer construction. The processing of the MCA elements requires involved detail and time, in part to ensure the removal of all organic components contained in the polymer binder and the noble metal electrode layers.1

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Michael F. Gunther, Richard O. Claus, Tuan A. Tran, and Jonathan A. Greene "High-temperature optical fiber displacement sensors for intelligent process monitoring of multilayer ceramic actuators", Proc. SPIE 2360, Tenth International Conference on Optical Fibre Sensors, (14 September 1994); https://doi.org/10.1117/12.184971

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