Precision and performance of polysilicon micromirrors for hybrid integrated optics

Olav Solgaard; Norman C. Tien; Michael J. Daneman; Meng-Hsiung Kiang; Alois Friedberger; Richard S. Muller; Kam Y. Lau

doi:10.1117/12.209011

12 May 1995 Precision and performance of polysilicon micromirrors for hybrid integrated optics

Olav Solgaard, Norman C. Tien, Michael J. Daneman, Meng-Hsiung Kiang, Alois Friedberger, Richard S. Muller, Kam Y. Lau

Proceedings Volume 2383, Micro-Optics/Micromechanics and Laser Scanning and Shaping; (1995) https://doi.org/10.1117/12.209011
Event: Photonics West '95, 1995, San Jose, CA, United States

Abstract

We have designed and built integrated, movable micromirrors for on-chip alignment in silicon- optical-bench technology. The mirrors are fabricated using surface micromachining with three polysilicon layers. A polysilicon-hinge technology was used to achieve the required vertical dimensions and functionality for alignment in hybrid photonic integrated circuits. The positioning accuracy of the mirrors is measured to be on the order of 0.2 micrometers . This precision is shown theoretically and experimentally to be sufficient for laser-to-fiber coupling. In the experimental verification, we used external actuators to position the micromirror and obtained 45% coupling efficiency from a semiconductor laser (operating at 1.3 micrometers ) to a standard single-mode optical fiber. The stability and robustness of the micromirrors were demonstrated in shock and vibration tests that showed that the micromirrors will withstand normal handling and operation without the need for welding or gluing. This micromirror technology combines the low-cost advantage of passive alignment and the accuracy of active alignment. In addition to optoelectronic packaging, the micromirrors can be expected to find applications in grating-tuned external-cavity lasers, scanning lasers, and interferometers.

Citation Download Citation

Olav Solgaard, Norman C. Tien, Michael J. Daneman, Meng-Hsiung Kiang, Alois Friedberger, Richard S. Muller, and Kam Y. Lau "Precision and performance of polysilicon micromirrors for hybrid integrated optics", Proc. SPIE 2383, Micro-Optics/Micromechanics and Laser Scanning and Shaping, (12 May 1995); https://doi.org/10.1117/12.209011

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available