Low cost of ownership KrF excimer laser using a novel pulse power and chamber configuration

William N. Partlo; Richard L. Sandstrom; Igor V. Fomenkov; Palash P. Das

doi:10.1117/12.209294

26 May 1995 Low cost of ownership KrF excimer laser using a novel pulse power and chamber configuration

William N. Partlo, Richard L. Sandstrom, Igor V. Fomenkov, Palash P. Das

Author Affiliations +

Proceedings Volume 2440, Optical/Laser Microlithography VIII; (1995) https://doi.org/10.1117/12.209294
Event: SPIE's 1995 Symposium on Microlithography, 1995, Santa Clara, CA, United States

Abstract

A KrF excimer laser using an all solid state Pulse Power Modulator (PPM) has been studied. This PPM configuration replaces the commonly used thyratron switch with a Silicon Controlled Rectifier (SCR) switch combined with a pulse compression-voltage multiplication circuit. Use of this PPM has extended the useful chamber life of a line-narrowed KrF excimer laser from 1.5 billion to 2.5 billion pulses. Broadband KrF laser performance, optimized for mirror based scanner systems, has also been investigated. A minimum broadband chamber life of 5 billion pulses has been demonstrated with this solid state PPM. While a thyratron-based PPM exhibits an expected lifetime of 3 billion pulses, the solid state PPM used in these experiments has been operated for greater than 6 billion pulses without any decrease in performance. Since 72% of the replacement parts cost for the ELS-4000D line-narrowed excimer laser is due to periodic chamber and PPM replacement, significant cost of ownership reduction is realized by extending the lifetime of the chamber and the PPM.

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William N. Partlo, Richard L. Sandstrom, Igor V. Fomenkov, and Palash P. Das "Low cost of ownership KrF excimer laser using a novel pulse power and chamber configuration", Proc. SPIE 2440, Optical/Laser Microlithography VIII, (26 May 1995); https://doi.org/10.1117/12.209294

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