Prediction of 0.18 um CMOS technology performance using tuned device simulation

Mahalingam Nandakumar; Mark Rodder; Ih-Chin Chen

doi:10.1117/12.221153

15 September 1995 Prediction of 0.18 um CMOS technology performance using tuned device simulation

Mahalingam Nandakumar, Mark Rodder, Ih-Chin Chen

Proceedings Volume 2636, Microelectronic Device and Multilevel Interconnection Technology; (1995) https://doi.org/10.1117/12.221153
Event: Microelectronic Manufacturing '95, 1995, Austin, TX, United States

Abstract

For the design of a scaled CMOS technology, it becomes necessary to use predictive device simulation to improve MOSFET design and reduce the design cycle time. The results of a simulation study which is carried out to predict the performance of N and P channel MOSFETs with a physical gate length (L_g) of 0.18 micrometers are reported in this paper. The performance of the MOSFETs is estimated using a performance Figure of Merit (FOM[1]) calculated from their simulated I-V characteristics. This study is used to identify particular improvements to an existing 0.25 micrometers , 2.5 V, 60 A technology [2] so as to meet the FOM target at a 0.18 micrometers , 1.5 V, 36 A technology node.

Citation Download Citation

Mahalingam Nandakumar, Mark Rodder, and Ih-Chin Chen "Prediction of 0.18 um CMOS technology performance using tuned device simulation", Proc. SPIE 2636, Microelectronic Device and Multilevel Interconnection Technology, (15 September 1995); https://doi.org/10.1117/12.221153

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available