Phase shifting algorithms for nonsinusoidal signals compensating nonlinear phase-shift errors and their susceptibility to random noise

K. Hibino

doi:10.1117/12.2298998

1 September 1996 Phase shifting algorithms for nonsinusoidal signals compensating nonlinear phase-shift errors and their susceptibility to random noise

K. Hibino

Author Affiliations +

Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 277838 (1996) https://doi.org/10.1117/12.2298998
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of

Abstract

In phase-shifting interferometry, nonlinear motion of the phase shifter and non-sinusoidal waveform of the signal are the two most common sources of systematic errors in the measured phase. A j + 4-sample algorithm is derived which compensates for quadratic nonlinearity of the phase shifter and the effect of harmonic components of the signal up to the jth order. The susceptibility of the algorithm to random noise is also discussed.

Citation Download Citation

K. Hibino "Phase shifting algorithms for nonsinusoidal signals compensating nonlinear phase-shift errors and their susceptibility to random noise", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 277838 (1 September 1996); https://doi.org/10.1117/12.2298998

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