Paper
26 August 1996 Beam divergence studies on a long-pulse XeCl excimer laser
Ramon M. Hofstra, Frederik A. van Goor, Wilhelmus J. Witteman
Author Affiliations +
Proceedings Volume 2788, High-Power Lasers: Gas and Solid State Lasers; (1996) https://doi.org/10.1117/12.248608
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France
Abstract
The focusability of a long pulse XeCl excimer laser has been improved using confocal positive branch unstable resonators where the outcoupling is done through the convex mirror. For the outcoupler different reflectivity profiles are used. A near diffraction limited output beam is obtained from hard edge unstable resonators. A beam with only one central spot in the focus of a lens can be obtained with a resonator fitted with a Gaussian outcoupling mirror.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ramon M. Hofstra, Frederik A. van Goor, and Wilhelmus J. Witteman "Beam divergence studies on a long-pulse XeCl excimer laser", Proc. SPIE 2788, High-Power Lasers: Gas and Solid State Lasers, (26 August 1996); https://doi.org/10.1117/12.248608
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Cited by 1 scholarly publication.
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KEYWORDS
Resonators

Mirrors

Reflectivity

Diffraction

Excimer lasers

Near field

Laser resonators

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