Optical characterization method for high-frequency gratings

Heike Huebner; Guenter Nitzsche; Ernst-Bernhard Kley

doi:10.1117/12.256223

1 November 1996 Optical characterization method for high-frequency gratings

Heike Huebner, Guenter Nitzsche, Ernst-Bernhard Kley

Proceedings Volume 2863, Current Developments in Optical Design and Engineering VI; (1996) https://doi.org/10.1117/12.256223
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States

Abstract

An optical method for the determination of high spatial frequency grating profiles with visible light is presented. The theoretical background is the effective medium theory. By using an optical surface profiler, the change of the surface height in the grating region is measured in two different ways. The results can be used to determine the duty cycle and the groove depth in the case of a binary grating profile.

Citation Download Citation

Heike Huebner, Guenter Nitzsche, and Ernst-Bernhard Kley "Optical characterization method for high-frequency gratings", Proc. SPIE 2863, Current Developments in Optical Design and Engineering VI, (1 November 1996); https://doi.org/10.1117/12.256223

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