New concept for roughness measurement: mean surface

Chunlong Wei; Mingyi Chen; ZhiJiang Wang

doi:10.1117/12.253025

3 October 1996 New concept for roughness measurement: mean surface

Chunlong Wei, Mingyi Chen, ZhiJiang Wang

Proceedings Volume 2899, Automated Optical Inspection for Industry; (1996) https://doi.org/10.1117/12.253025
Event: Photonics China '96, 1996, Beijing, China

Abstract

A new concept for roughness measurement is presented in this paper. The new concept is the mean surface that describes the summation of the shape, error and waviness of a profile surface measured by the interferometric microscope. The mean surface is fitted by the Zernike polynomials in a least squares sense. When the mean surface is subtracted from the profile data, the roughness can be calculated. The numerical simulations show that the accuracy is enough high.

Citation Download Citation

Chunlong Wei, Mingyi Chen, and ZhiJiang Wang "New concept for roughness measurement: mean surface", Proc. SPIE 2899, Automated Optical Inspection for Industry, (3 October 1996); https://doi.org/10.1117/12.253025

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