3-D surface profilometry using optic fiber phase-shifting DMDP method

Hua Fan; Hong Zhao; Wenyi Cheng; Feng Tian; Yushan Tan

doi:10.1117/12.269818

20 March 1997 3-D surface profilometry using optic fiber phase-shifting DMDP method

Hua Fan, Hong Zhao, Wenyi Cheng, Feng Tian, Yushan Tan

Proceedings Volume 2921, International Conference on Experimental Mechanics: Advances and Applications; (1997) https://doi.org/10.1117/12.269818
Event: International Conference on Experimental Mechanics: Advances and Applications, 1996, Singapore, Singapore

Abstract

In this paper, we introduce a novel profilometry based on computer aided image process technique which combines single mode optic fiber phase shifting interferometer as the illumination part of the configuration. The design of the optic fiber interferometer has the follow features: easily adjustable fringe space and rotation, automatic phase shifting. Besides these, it has a number of important advantages over the more conventional methods for producing projection fringes, such as extremely small size and weight, high visible fringes with little noise and absolute sinusoidal intensity distribution etc. These are very important and necessary to dual-measurement with different precision (DMDP) method for automatic phase unwrapping. Fringes generated by the interferometer are analyzed, and the relationship between the fringe phase and height distribution of an illuminated diffused surface is derived. The dual-measurement with different precision automatic phase unwrapping method is described. An example of the profilometry in operation is given.

Citation Download Citation

Hua Fan, Hong Zhao, Wenyi Cheng, Feng Tian, and Yushan Tan "3-D surface profilometry using optic fiber phase-shifting DMDP method", Proc. SPIE 2921, International Conference on Experimental Mechanics: Advances and Applications, (20 March 1997); https://doi.org/10.1117/12.269818

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KEYWORDS

Image processing

Phase shifts

Spatial frequencies

3D image processing

Interferometers

Optical fibers

3D metrology

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