Solid state lasers for 193-nm photolithography

Roy D. Mead; Charles E. Hamilton; Dennis D. Lowenthal

doi:10.1117/12.276009

7 July 1997 Solid state lasers for 193-nm photolithography

Roy D. Mead, Charles E. Hamilton, Dennis D. Lowenthal

Proceedings Volume 3051, Optical Microlithography X; (1997) https://doi.org/10.1117/12.276009
Event: Microlithography '97, 1997, Santa Clara, CA, United States

Abstract

Advances in technology now make possible solid-state 193 nm lasers. Solid-state can operate with pulse repetition rates of > 10 kHz, minimizing peak-power damage to stepper optics. Furthermore, solid-state lasers are potentially more reliable and could have lower operating costs than ArF excimer lasers. Achievement of spectral linewidths < 0.1 pm for use with refractive lens systems is straightforward in solid-state laser systems. Ultraviolet solid-state laser technology is much less mature than excimer laser technology; so while there is far to go, there is much more potential for rapid progress in solid-state lasers than in excimer lasers. Aculight has begun a program to develop a multiwatt, 10 kHz solid-state 193 nm laser. Although efficient conversion from 1064 nm to 193 nm is easier for high peak power pulses, minimization of lens damage requires low peak power. Eventual goals for the technology are to achieve output powers 10 - 20 W at > 20 kHz repetition rate in > 10 ns pulses, limiting peak powers to < 200 kW. High pulse repetition rates will permit excellent dose control, and facilitate decoherence of the high-coherence beam from the solid-state laser system.

Citation Download Citation

Roy D. Mead, Charles E. Hamilton, and Dennis D. Lowenthal "Solid state lasers for 193-nm photolithography", Proc. SPIE 3051, Optical Microlithography X, (7 July 1997); https://doi.org/10.1117/12.276009

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available