Paper
5 September 1997 Statistical design of experimental analysis of TiN films deposited by ion metal plasma PVD for sub-0.25-um IC process applications
Simon Hui, Ken Ngan, Murali K. Narasimhan, John Forster
Author Affiliations +
Abstract
A Vectra IMPTM (Ion Metal Plasma) source was used to deposit TiN films for application such as W plug liner and Al wetting layer. The process is based on conventional magnetron sputtering with the addition of a higher density, inductively coupled RF plasma between the sputtering cathode and the substrate. This new technology enables deposition of the films into deep submicron contacts with >50% bottom coverage. In addition to enhancing step coverage of metal films, such as Ti and TiN, this process also has significant effects on the materials properties of the films. The film properties of the TiN films were studied as a function of the fundamental process parameters, namely DC target power, RF coil power, and chamber process pressure, using statistical DOE technique. The study shows that a high degree of control over the film properties can be obtained in the IMP process.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Simon Hui, Ken Ngan, Murali K. Narasimhan, and John Forster "Statistical design of experimental analysis of TiN films deposited by ion metal plasma PVD for sub-0.25-um IC process applications", Proc. SPIE 3214, Multilevel Interconnect Technology, (5 September 1997); https://doi.org/10.1117/12.284659
Lens.org Logo
CITATIONS
Cited by 2 scholarly publications.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Tin

Plasma

Metals

Ions

Diffractive optical elements

Sputter deposition

Statistical analysis

Back to Top