Implementation of an actively controlled white light interferometer for measurement of subwavelength structural disturbances

Karl N. Schrader

doi:10.1117/12.332484

8 December 1998 Implementation of an actively controlled white light interferometer for measurement of subwavelength structural disturbances

Karl N. Schrader

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Proceedings Volume 3430, Novel Optical Systems and Large-Aperture Imaging; (1998) https://doi.org/10.1117/12.332484
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

A system is presented for sensing nanometer scale structural disturbances using white light interferometry in conjunction with a tracking controller. A Michelson interferometer is established using a fiber-coupled white light source, a beamsplitter cube, an actuated reference mirror, and a retroreflector attached to the structure of interest. Structural motion is determined by actively tracking the zeroth order white light interference fringe. A multimode controller architecture enables location of the white light fringe packet, coarse tracking of the packet by modulation of the actuated mirror, and fine tracking by locking onto the slope of the zeroth order fringe. Resolution and bandwidth of the measurement system is increased at each successive mode. Experimental results of the system prototype are presented. Applications include position control of optical elements in segmented aperture imaging systems such as the Next Generation Space Telescope and the USAF Research Lab UltraLITE space imager.

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Karl N. Schrader "Implementation of an actively controlled white light interferometer for measurement of subwavelength structural disturbances", Proc. SPIE 3430, Novel Optical Systems and Large-Aperture Imaging, (8 December 1998); https://doi.org/10.1117/12.332484

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KEYWORDS

Modulation

Mirrors

Actuators

Interferometers

Sensors

Signal detection

Signal processing

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