Electromagnetic driving units for complex microrobotic systems

Frank Michel; Wolfgang Ehrfeld; Udo Berg; Reinhard Degen; Felix Schmitz

doi:10.1117/12.325729

5 October 1998 Electromagnetic driving units for complex microrobotic systems

Frank Michel, Wolfgang Ehrfeld, Udo Berg, Reinhard Degen, Felix Schmitz

Proceedings Volume 3519, Microrobotics and Micromanipulation; (1998) https://doi.org/10.1117/12.325729
Event: Photonics East (ISAM, VVDC, IEMB), 1998, Boston, MA, United States

Abstract

Electromagnetic actuators play an important role in macroscopic robotic systems. In combination with motion transformers, like reducing gear units, angular gears or spindle-screw drives, electromagnetic motors in large product lines ensure the rotational or linear motion of robot driving units and grippers while electromagnets drive valves or part conveyors. In this paper micro actuators and miniaturized motion transformers are introduced which allow a similar development in microrobotics. An electromagnetic motor and a planetary gear box, both with a diameter of 1.9 mm, are already commercially available from the cooperation partner of IMM, the company Dr. Fritz Faulhaber GmbH in Schonaich, Germany. In addition, a motor with a diameter of 2.4 mm is in development. The motors successfully drive an angular gear and a belt drive. A linear stage with a motion range of 7 mm and an overall size as small as 5 X 3.5 X 24 mm³ has been realized involving the motor, a stationary spur gear with zero backlash and a spindle-screw drive. By the use of these commercially available elements complex microrobots can be built up cost-efficiently and rapidly. Furthermore, a batch process has been developed to produce the coils of micro actuator arrays using lithographic techniques with SU-8 resin. In applying these components, the modular construction of complex microrobotic systems becomes feasible.

Citation Download Citation

Frank Michel, Wolfgang Ehrfeld, Udo Berg, Reinhard Degen, and Felix Schmitz "Electromagnetic driving units for complex microrobotic systems", Proc. SPIE 3519, Microrobotics and Micromanipulation, (5 October 1998); https://doi.org/10.1117/12.325729

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