Determination of the bonding qualities of layered gold/silicon systems using higher SAW modes

Thomas Blum; Klaus Kosbi; Ulla Scheer; Siegfried Boseck

doi:10.1117/12.330484

11 November 1998 Determination of the bonding qualities of layered gold/silicon systems using higher SAW modes

Thomas Blum, Klaus Kosbi, Ulla Scheer, Siegfried Boseck

Proceedings Volume 3581, Acousto-Optics and Applications III; (1998) https://doi.org/10.1117/12.330484
Event: Acousto-Optics and Applications III, 1998, Gdansk-Jurata, Poland

Abstract

Dispersion curves of SAWs propagating on the surface of a layered system wee obtained by measurement of the surface wave velocities for various ultrasonic frequencies. Results are presented for two and three layered specimens: gold/silicon and gold/chromium/silicon. A comparison with numerically simulated dispersion curves shows that Sezawa modes were measured. The elastic constants, namely c₁₁ and c₄₄, of gold films with thicknesses up to 2 micrometers were determined by minimization the difference between the theoretical and the experimental values in a least-square sense. The resulting Young modulus E yields information about a stiffer layer structure caused by the influence of an chromium interlayer. The modification of the interface between film and substrate is characterized. The results confirm the use of chromium for better adhesion.

Citation Download Citation

Thomas Blum, Klaus Kosbi, Ulla Scheer, and Siegfried Boseck "Determination of the bonding qualities of layered gold/silicon systems using higher SAW modes", Proc. SPIE 3581, Acousto-Optics and Applications III, (11 November 1998); https://doi.org/10.1117/12.330484

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