Conducting polymer FET devices for vapor sensing

James A. Covington; Julian W. Gardner; John V. Hatfield

doi:10.1117/12.354282

20 July 1999 Conducting polymer FET devices for vapor sensing

James A. Covington, Julian W. Gardner, John V. Hatfield

Proceedings Volume 3673, Smart Structures and Materials 1999: Smart Electronics and MEMS; (1999) https://doi.org/10.1117/12.354282
Event: 1999 Symposium on Smart Structures and Materials, 1999, Newport Beach, CA, United States

Abstract

Conducting polymer films are employed as the active material in both resistive and acoustic waves gas sensors. Here we describe the use of an electroactive conducting polymer as the gate material in a gas-sensitive MOSFET sensor run at ambient temperature and compare it to a conventional catalytic metal gate MOSFET run at 180 degree(s)C.

Citation Download Citation

James A. Covington, Julian W. Gardner, and John V. Hatfield "Conducting polymer FET devices for vapor sensing", Proc. SPIE 3673, Smart Structures and Materials 1999: Smart Electronics and MEMS, (20 July 1999); https://doi.org/10.1117/12.354282

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