Gas curtain for mitigating hydrocarbon contamination of EUV lithographic optical components

Michael P. Kanouff; Avijit K. Ray-Chaudhuri

doi:10.1117/12.351077

25 June 1999 Gas curtain for mitigating hydrocarbon contamination of EUV lithographic optical components

Michael P. Kanouff, Avijit K. Ray-Chaudhuri

Proceedings Volume 3676, Emerging Lithographic Technologies III; (1999) https://doi.org/10.1117/12.351077
Event: Microlithography '99, 1999, Santa Clara, CA, United States

Abstract

Calculations were carried out to study the effectiveness of a gas curtain for mitigating contamination form hydrocarbon gases in extreme UV (EUV) lithography tools. The momentum, energy and mass transport in the curtain and surrounding regions were calculated using a 2D finite volume model of a lithography tool. Argon was used for the gas curtain. The results from the calculations quantify the relationship between the argon flow rate and the hydrocarbon partial pressure in the region of the optical elements. In general, the hydrocarbon partial pressure decreases as the mass transfer Peclet number, Pe equals Vh/D, increases, where V is the velocity of the argon, h is the thickness of the gas curtain and D is the mass diffusivity. An argon flow rate of 12.2 torr 1/s is required to reduce the hydrocarbon partial pressure from 10^-7 to 10^-10 torr in the specific lithography tool considered here. The EUV transmission in the tool with the gas curtain is 0.93. This is a large improvement over the 0.5 transmission that would result by using a solid filter to contain the hydrocarbon gas.

Citation Download Citation

Michael P. Kanouff and Avijit K. Ray-Chaudhuri "Gas curtain for mitigating hydrocarbon contamination of EUV lithographic optical components", Proc. SPIE 3676, Emerging Lithographic Technologies III, (25 June 1999); https://doi.org/10.1117/12.351077

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available