Novel aberration monitor for optical lithography

Peter Dirksen; Casper A. H. Juffermans; Rudy J. M. Pellens; Mireille Maenhoudt; Peter De Bisschop

doi:10.1117/12.354385

26 July 1999 Novel aberration monitor for optical lithography

Peter Dirksen, Casper A. H. Juffermans, Rudy J. M. Pellens, Mireille Maenhoudt, Peter De Bisschop

Proceedings Volume 3679, Optical Microlithography XII; (1999) https://doi.org/10.1117/12.354385
Event: Microlithography '99, 1999, Santa Clara, CA, United States

Abstract

The aberration monitor allows independent determination of spherical, coma, astigmatism and three point in a single experiment using existing equipment. The monitor consists of a circular phase object, with a diameter of approximately (lambda) /NA and a phase depth of (lambda) /2. Due to the relative large diameter, the image prints as a narrow ring into the resist. Without aberrations its contours are concentric circles. Aberrations deform the ring in a characteristic way. A detailed analysis of the ring shape through focus identifies the aberrations of the projection lens. A linear aberration model is compared with simulations. Experimental results of various aberrations are shown and ar correlated to line width measurements and interferometric lens data.

Citation Download Citation

Peter Dirksen, Casper A. H. Juffermans, Rudy J. M. Pellens, Mireille Maenhoudt, and Peter De Bisschop "Novel aberration monitor for optical lithography", Proc. SPIE 3679, Optical Microlithography XII, (26 July 1999); https://doi.org/10.1117/12.354385

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