Wire diameter determination by interferometry and diffraction: the improvement of diffraction models in 3D objects

Juan Carlos Martinez-Anton; Ibrahim Serroukh; Eusebio Bernabeu

doi:10.1117/12.357787

17 August 1999 Wire diameter determination by interferometry and diffraction: the improvement of diffraction models in 3D objects

Juan Carlos Martinez-Anton, Ibrahim Serroukh, Eusebio Bernabeu

Author Affiliations +

Proceedings Volume 3745, Interferometry '99: Applications; (1999) https://doi.org/10.1117/12.357787
Event: International Conference on Optical Metrology, 1999, Pultusk Castle, Poland

Abstract

The laser diffraction is a robust and precise technique to monitor wire diameters in-line. However, classical Fraunhofer diffraction formulas are not appropriate for 3D object size determination. The Babinet's principle allow to use such formulas only for angles of diffraction that tend to zero. A real diffraction measurement necessarily takes a finite angular range (approximately 10 degree(s)) and therefore, an error will be introduced if using classical formulas. The exact electromagnetic formulation is not appropriate to deal with 3D objects in a simple way. On the other hand we observed a systematic overestimation of the diameter, even very small angle of observation, in other words, a small misfit with the Babinet's principle.

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Juan Carlos Martinez-Anton, Ibrahim Serroukh, and Eusebio Bernabeu "Wire diameter determination by interferometry and diffraction: the improvement of diffraction models in 3D objects", Proc. SPIE 3745, Interferometry '99: Applications, (17 August 1999); https://doi.org/10.1117/12.357787

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