Novel inspection system with design rule check for high-accuracy reticles

Takayoshi Matsuyama; Kenichi Kobayashi; Daikichi Awamura; Katsuyoshi Nakashima; Yasunori Hada

doi:10.1117/12.360228

25 August 1999 Novel inspection system with design rule check for high-accuracy reticles

Takayoshi Matsuyama, Kenichi Kobayashi, Daikichi Awamura, Katsuyoshi Nakashima, Yasunori Hada

Proceedings Volume 3748, Photomask and X-Ray Mask Technology VI; (1999) https://doi.org/10.1117/12.360228
Event: Photomask and X-Ray Mask Technology VI, 1999, Yokohama, Japan

Abstract

A pattern defect inspection system (8MD93_R) that features a new concept has been developed. The performance of the design rule check function (DRCF) which this inspection system features was evaluated using a test reticle with a special program defect. As a result, it was confirmed that DRCF made it possible to put pattern inspection that is free from false defects into practical use. Also, we determined the relationship between the image processing accuracy required for DRCF and the reticle defect detection performance. It was confirmed that DRCF could also be used to detect general reticle pattern defects and make an overlay check for a reticle and a reticle of different layer pattern.

Citation Download Citation

Takayoshi Matsuyama, Kenichi Kobayashi, Daikichi Awamura, Katsuyoshi Nakashima, and Yasunori Hada "Novel inspection system with design rule check for high-accuracy reticles", Proc. SPIE 3748, Photomask and X-Ray Mask Technology VI, (25 August 1999); https://doi.org/10.1117/12.360228

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