Integrated micromachined scanning display systems

Paul M. Hagelin; Uma Krishnamoorthy; Robert A. Conant; Richard S. Muller; Kam Y. Lau; Olav Solgaard

doi:10.1117/12.354841

19 July 1999 Integrated micromachined scanning display systems

Paul M. Hagelin, Uma Krishnamoorthy, Robert A. Conant, Richard S. Muller, Kam Y. Lau, Olav Solgaard

Proceedings Volume 3749, 18th Congress of the International Commission for Optics; (1999) https://doi.org/10.1117/12.354841
Event: ICO XVIII 18th Congress of the International Commission for Optics, 1999, San Francisco, CA, United States

Abstract

We describe a raster-scanning display system comprised of two tilt-up micromachined polysilicon mirrors that rotate about orthogonal axes. We have demonstrated a resolution of 102 X 119 pixels. The optical efficiency of our two- mirror micro-optical raster-scanning system is comparable to that of micromachined display systems developed by Texas Instruments and Silicon Light Machines. Ease of integration with on-chip light sources and lenses has the potential to reduce packaging size, complexity and cost of the display system and makes it well suited for head-mounted display applications.

Citation Download Citation

Paul M. Hagelin, Uma Krishnamoorthy, Robert A. Conant, Richard S. Muller, Kam Y. Lau, and Olav Solgaard "Integrated micromachined scanning display systems", Proc. SPIE 3749, 18th Congress of the International Commission for Optics, (19 July 1999); https://doi.org/10.1117/12.354841

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available