R&D program on multisegmented piezoelectric bimorph mirrors at the ESRF--status report: II

Riccardo Signorato

doi:10.1117/12.370111

16 November 1999 R&D program on multisegmented piezoelectric bimorph mirrors at the ESRF--status report: II

Riccardo Signorato

Proceedings Volume 3773, X-Ray Optics Design, Performance, and Applications; (1999) https://doi.org/10.1117/12.370111
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

The aim of this paper is to review the performances of the multi-segmented piezoelectric bimorph mirrors currently installed at the European Synchrotron Radiation Facility (ESRF). These innovative devices effectively combine the possibility of varying dynamically the average spherical bending radius (active mode) with the capability of acting locally on the reflecting surface shape (adaptive mode). A first generation consisting of two prototypes (450 and 750 mm long) was completely characterized in the ESRF metrology laboratory and the mirrors are installed and fully operational on the ID26 and ID32 beamlines since October 1997. A second generation prototype mirror (450 mm long) has been designed, manufactured, tested in the ESRF metrology laboratory, installed and commissioned at ID26 in early 1998. This last mirror exhibits sub-(mu) rad residual slope error rms in its central portion, 1 angstrom rms averaged microroughness and can routinely achieve a vertical beam size as small as 7 micrometer FWHM at a focal distance of almost 3 m.

Citation Download Citation

Riccardo Signorato "R&D program on multisegmented piezoelectric bimorph mirrors at the ESRF--status report: II", Proc. SPIE 3773, X-Ray Optics Design, Performance, and Applications, (16 November 1999); https://doi.org/10.1117/12.370111

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