XUV laser reflectometry for optical constant determination

Igor A. Artioukov; Brady R. Benware; Jorge J. G. Rocca; Matt Forsythe; Yurii A. Uspenskii; Alexander V. Vinogradov

doi:10.1117/12.366672

21 October 1999 XUV laser reflectometry for optical constant determination

Igor A. Artioukov, Brady R. Benware, Jorge J. G. Rocca, Matt Forsythe, Yurii A. Uspenskii, Alexander V. Vinogradov

Proceedings Volume 3776, Soft X-Ray Lasers and Applications III; (1999) https://doi.org/10.1117/12.366672
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

We report the measurement of the optical constants of Si, GaP, InP, GaAs, GaAsP and Ir at a wavelength of 46.9 nm (26.5 eV). The optical constants were obtained from the measurement of the variation of the reflectivity as a function of angle utilizing, as an illumination source, a discharge pumped 46.9 nm table-top laser operated at a repetition rate of 1 Hz. These measurements constitute the first application of an ultrashort wavelength laser to materials research.

Citation Download Citation

Igor A. Artioukov, Brady R. Benware, Jorge J. G. Rocca, Matt Forsythe, Yurii A. Uspenskii, and Alexander V. Vinogradov "XUV laser reflectometry for optical constant determination", Proc. SPIE 3776, Soft X-Ray Lasers and Applications III, (21 October 1999); https://doi.org/10.1117/12.366672

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