Optical system design for excimer laser materials processing

Lars Unnebrink; Thomas F. E. Henning; Ernst-Wolfgang Kreutz; Reinhart Poprawe

doi:10.1117/12.368233

5 October 1999 Optical system design for excimer laser materials processing

Lars Unnebrink, Thomas F. E. Henning, Ernst-Wolfgang Kreutz, Reinhart Poprawe

Proceedings Volume 3779, Current Developments in Optical Design and Optical Engineering VIII; (1999) https://doi.org/10.1117/12.368233
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

Non-imaging integrator which can be used for laser beam homogenization in material processing with excimer laser radiation are analyzed with regards to geometrical and statistical optics. A model for the transversal degree of coherence of the laser radiation are analyzed with regards to geometrical and statistical optics. A model of the transversal degree of coherence of the laser radiation is presented in order to estimate the performance of the integrating devices for the partially coherent excimer laser radiation. This is necessary for a more relevant design of those elements than a design by geometric optical means only. The concept of non-imaging integrators is enhanced by separating the multifaceted element from the focusing lens. This separation provides more flexibility in the processing distance of the optical system. A further enhancement is the combination of such a system with an imaging lens in order to create a system which produces a top hat fluence distribution with variable size for materials processing applications.

Citation Download Citation

Lars Unnebrink, Thomas F. E. Henning, Ernst-Wolfgang Kreutz, and Reinhart Poprawe "Optical system design for excimer laser materials processing", Proc. SPIE 3779, Current Developments in Optical Design and Optical Engineering VIII, (5 October 1999); https://doi.org/10.1117/12.368233

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