CMOS-based chemical microsensors: components of a micronose system

Andreas Hierlemann; Andreas Koll; Dirk Lange; Christoph Hagleitner; Nicole Kerness; Oliver Brand; Henry Baltes

doi:10.1117/12.370283

18 November 1999 CMOS-based chemical microsensors: components of a micronose system

Andreas Hierlemann, Andreas Koll, Dirk Lange, Christoph Hagleitner, Nicole Kerness, Oliver Brand, Henry Baltes

Proceedings Volume 3857, Chemical Microsensors and Applications II; (1999) https://doi.org/10.1117/12.370283
Event: Photonics East '99, 1999, Boston, MA, United States

Abstract

We report on results achieved with three different types of polymer-coated chemical microsensors fabricated in industrial CMOS technology. The first and most extensively studied transducer is a microcapacitor sensitive to changes in dielectric properties of the polymer layer due to analyte absorption. An on-chip integrated (Sigma) (Delta) -converter allows for detecting the minute capacitance changes. The second transducer is a resonant cantilever sensitive to predominantly mass changes. The cantilever is electrothermally excited, its vibrations are detected using a piezoresistive Wheatstone bridge. In analogy to acoustic wave devices, analyte absorption in the polymer causes resonance frequency shifts as a consequent of changes in the vibrating mass. The last transducer is a microcalorimeter consisting of a polymer-coated sensing thermopile and an uncoated reference thermopile each on micromachined membranes. The measurand is the absorption or desorption heat of organic volatiles in the polymer layer. The difference between the resulting thermovoltages is processed with an on-chip low-noise differential amplifier. Enthalpy changes on the order of (mu) J have been detected.

Citation Download Citation

Andreas Hierlemann, Andreas Koll, Dirk Lange, Christoph Hagleitner, Nicole Kerness, Oliver Brand, and Henry Baltes "CMOS-based chemical microsensors: components of a micronose system", Proc. SPIE 3857, Chemical Microsensors and Applications II, (18 November 1999); https://doi.org/10.1117/12.370283

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