Fabrication and characterization of porous silicon integrated waveguides

Andrea M. Rossi; Ivo Rendina; Guido Perrone; Frederica Cappelluti; Anna Morra; Gianpiero Amato; Luca Boarino; Gabriella Motta

doi:10.1117/12.379611

15 March 2000 Fabrication and characterization of porous silicon integrated waveguides

Andrea M. Rossi, Ivo Rendina, Guido Perrone, Frederica Cappelluti, Anna Morra, Gianpiero Amato, Luca Boarino, Gabriella Motta

Author Affiliations +

Proceedings Volume 3953, Silicon-based Optoelectronics II; (2000) https://doi.org/10.1117/12.379611
Event: Symposium on Integrated Optoelectronics, 2000, San Jose, CA, United States

Abstract

Porous silicon (PS) has been known for quite a long time for its photoluminescence and for its usage as a sensing element. However, only in recent years this material has been proposed as a substrate for integrated optoelectronic devices and, despite the low fabrication costs and the possibility to tailor the refractive index varying the material porosity, its usage is still at the very beginning. In this paper we present the fabrication of integrated waveguides in PS and we describe our efforts to reduce the propagation losses. Different fabrication approaches have been studied: the first one uses selective anodization to obtain layers with different porosity and thus different refractive index. Another one exploits the different oxidation grades of the various porous layers to fabricate dense oxidized porous silicon waveguides. A detailed characterization of the obtained waveguides is reported. In particular, propagation losses as low as 7 dB/cm have been obtained in simple non-optimized multimode planar waveguides at the optical communication wavelength of 1.55 micrometers . This encouraging result paves the way to the next realization of porous silicon-based integrated optical devices for communication and sensing purposes. Finally, the results concerning a completely new approach, based on a laser ablation technique, to define the rib structure of porous silicon channel waveguides is presented.

Citation Download Citation

Andrea M. Rossi, Ivo Rendina, Guido Perrone, Frederica Cappelluti, Anna Morra, Gianpiero Amato, Luca Boarino, and Gabriella Motta "Fabrication and characterization of porous silicon integrated waveguides", Proc. SPIE 3953, Silicon-based Optoelectronics II, (15 March 2000); https://doi.org/10.1117/12.379611

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available