Technology assessment of MEMS for NDE and condition-based maintenance

George A. Matzkanin

doi:10.1117/12.385031

5 May 2000 Technology assessment of MEMS for NDE and condition-based maintenance

George A. Matzkanin

Proceedings Volume 3994, Nondestructive Evaluation of Aging Aircraft, Airports, and Aerospace Hardware IV; (2000) https://doi.org/10.1117/12.385031
Event: SPIE's 5th Annual International Symposium on Nondestructive Evaluation and Health Monitoring of Aging Infrastructure, 2000, Newport Beach, CA, United States

Abstract

Interest continues to increase in applying MEMS technology for advancing both NDE and condition based maintenance (CBM) applications. The advantages of drastic size and weight reduction of MEMS enable consideration of developing low-cost, high-performance, ultra-portable, MEMS-based diagnostic systems for field inspections. For system health monitoring, it is feasible to envision permanently attached, distributed networks of micro-sensors on structural surfaces, e.g, acoustic emission sensors, accelerometers, strain gages, and pressure sensors. In addition, embedded MEMS based sensors could be used for continuous health monitoring of structures and systems. Under sponsorship of the Naval Air Warfare Center, NTIAC has performed an extensive review of the current status of MEMS technology and an assessment of how this technology can be used in applications of NDE and CBM. This presentation will provide a summary of the results of this technology assessment and describe recent MEMS developments in ultrasonics, eddy current, structural health monitoring and the medical field with potential for application to NDE and CBM.

Citation Download Citation

George A. Matzkanin "Technology assessment of MEMS for NDE and condition-based maintenance", Proc. SPIE 3994, Nondestructive Evaluation of Aging Aircraft, Airports, and Aerospace Hardware IV, (5 May 2000); https://doi.org/10.1117/12.385031

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