Fabrication of surface-micromachined thermally driven micropump by anhydrous HF gas-phase etching with 2-propanol

Won-Ick Jang; Chang-Auck Choi; Myung-Lae Lee; Chi-Hoon Jun; Youn Tae Kim

doi:10.1117/12.396426

25 August 2000 Fabrication of surface-micromachined thermally driven micropump by anhydrous HF gas-phase etching with 2-propanol

Won-Ick Jang, Chang-Auck Choi, Myung-Lae Lee, Chi-Hoon Jun, Youn Tae Kim

Author Affiliations +

Proceedings Volume 4174, Micromachining and Microfabrication Process Technology VI; (2000) https://doi.org/10.1117/12.396426
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

In silicon surface micromachining, the HF GPE process was verified as a very effective method for the dry release of microstructures. The developed GPE system with anhydrous HF gas and 2-propanol vapor was characterized and its selective etching properties were discussed. The polysilicon membrane was used as a structural layer and LTO and PECVD oxide as a sacrificial layer. We successfully fabricated the surface micromachined microstructures of a thermally driven micropump with no virtually process-induced stiction and no residues after the GPE of sacrificial oxides on polysilicon substrates.

Citation Download Citation

Won-Ick Jang, Chang-Auck Choi, Myung-Lae Lee, Chi-Hoon Jun, and Youn Tae Kim "Fabrication of surface-micromachined thermally driven micropump by anhydrous HF gas-phase etching with 2-propanol", Proc. SPIE 4174, Micromachining and Microfabrication Process Technology VI, (25 August 2000); https://doi.org/10.1117/12.396426

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available