Triant model ware applied to Tegal 90X etchers as an integrated process control module

Morris Muller

doi:10.1117/12.410095

23 August 2000 Triant model ware applied to Tegal 90X etchers as an integrated process control module

Morris Muller

Proceedings Volume 4182, Process Control and Diagnostics; (2000) https://doi.org/10.1117/12.410095
Event: Microelectronic Manufacturing, 2000, Santa Clara, CA, United States

Abstract

This paper presents the implementation of Triant Model Ware on Tegal 90X series etchers to reduce wafer scarp on technologies associated with this tool set. Triant Model Ware becomes an integrated process control module of the Tegal etcher by means of a tool side computer interfaced to the Tegal system. Interface hardware provides the necessary communications interconnect for monitoring various sensor outputs associated with wafer processing values. Data acquisition hardware is implemented to provide real-time sensor information to support alarming conditions during signal monitoring. Models, associated with Triant Model Ware, monitor pertinent sensor conditions during wafer processing to identify possible process deviations attributable to scrap. Triant Model Ware examines process signatures on the Tegal etch system capturing potential equipment and process deviations reducing scrap on material on this tool set.

Citation Download Citation

Morris Muller "Triant model ware applied to Tegal 90X etchers as an integrated process control module", Proc. SPIE 4182, Process Control and Diagnostics, (23 August 2000); https://doi.org/10.1117/12.410095

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available