Aberration measurement of focal mirror by the phase shift in high-power CO2 laser processing

Zhiyong Wang; Hong Chen; Tiechuan Zuo

doi:10.1117/12.402559

9 October 2000 Aberration measurement of focal mirror by the phase shift in high-power CO₂ laser processing

Zhiyong Wang, Hong Chen, Tiechuan Zuo

Proceedings Volume 4221, Optical Measurement and Nondestructive Testing: Techniques and Applications; (2000) https://doi.org/10.1117/12.402559
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China

Abstract

In this paper, a new method to measure the aberration of focal mirror under high-power CO₂ laser beam irradiation by phase shift is proposed. The aberration caused by distortion of focal mirror changes the phase shift of laser beam. Therefore, the transverse intensity distribution (TID) on focus of the focal mirror under the high-power CO₂ laser beam irradiation is different from the ideal distribution. Furthermore, the changes of phase shift can be solved by comparing this difference. As well as the aberration can be obtained.

Citation Download Citation

Zhiyong Wang, Hong Chen, and Tiechuan Zuo "Aberration measurement of focal mirror by the phase shift in high-power CO₂ laser processing", Proc. SPIE 4221, Optical Measurement and Nondestructive Testing: Techniques and Applications, (9 October 2000); https://doi.org/10.1117/12.402559

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