Novel instrument for ultraprecise measurement of diameter

Zhifeng Chen; Haibao Lu; Shaozong Zhang

doi:10.1117/12.401795

5 October 2000 Novel instrument for ultraprecise measurement of diameter

Zhifeng Chen, Haibao Lu, Shaozong Zhang

Proceedings Volume 4223, Instruments for Optics and Optoelectronic Inspection and Control; (2000) https://doi.org/10.1117/12.401795
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China

Abstract

A novel instrument that can attain ultra-precision for measuring diameter of both orifice and cylinder is presented in this paper. The instrument is based on a combination of blazed grating, air-lubricated hydrostatic slide guide and ruby probe. The measure method is touch absolute measurement. Air-lubricated hydrostatic slide guide is adopted here to guarantee straightness. The blazed grating and ruby probe are applied to assure high resolution of Edge-checkout and length measurement. Meanwhile, the measurement force control system is controlled by electromagnetism so that the touch force between workpiece and ruby probe can be decreased. Therefore, the transform of the testing workpiece, which caused by touch force is decreased. The way of testing temperature control and vibration control is also used to ensure system high accuracy and measurement repeatability.

Citation Download Citation

Zhifeng Chen, Haibao Lu, and Shaozong Zhang "Novel instrument for ultraprecise measurement of diameter", Proc. SPIE 4223, Instruments for Optics and Optoelectronic Inspection and Control, (5 October 2000); https://doi.org/10.1117/12.401795

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