Two-photon equivalent weighting of spatial excimer laser beam profiles

Eric Eva; Harry H. Bauer; K. Metzger; A. Pfeiffer

doi:10.1117/12.425074

12 April 2001 Two-photon equivalent weighting of spatial excimer laser beam profiles

Eric Eva, Harry H. Bauer, K. Metzger, A. Pfeiffer

Proceedings Volume 4347, Laser-Induced Damage in Optical Materials: 2000; (2001) https://doi.org/10.1117/12.425074
Event: Laser-Induced Damage in Optical Materials: 2000, 2000, Boulder, CO, United States

Abstract

Damage in optical materials for semiconductor lithography applications caused by exposure to 248 or 193 nm light is usually two-photon driven, hence it is a nonlinear function of incident intensity. Materials should be tested with flat- topped temporal and spatial laser beam profiles to facilitate interpretation of data, but in reality this is hard to achieve. Sandstrom provided a formula that approximates any given temporal pulse shape with a two- photon equivalent rectangular pulse (Second Symposium on 193 nm Lithography, Colorado Springs 1997). Known as the integral-square pulse duration, this definition has been embraced as an industry standard. Originally faced with the problem of comparing results obtained with pseudo-Gaussian spatial profiles to literature data, we found that a general solution for arbitrarily inhomogeneous spatial beam profiles exists which results in a definition much similar to Sandstrom's. In addition, we proved the validity of our approach in experiments with intentionally altered beam profiles.

Citation Download Citation

Eric Eva, Harry H. Bauer, K. Metzger, and A. Pfeiffer "Two-photon equivalent weighting of spatial excimer laser beam profiles", Proc. SPIE 4347, Laser-Induced Damage in Optical Materials: 2000, (12 April 2001); https://doi.org/10.1117/12.425074

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