High Speed Image Processing Applied to Microscopy, With Special Reference to Quality Assurance

John W. Lockton

doi:10.1117/12.937009

9 January 1984 High Speed Image Processing Applied to Microscopy, With Special Reference to Quality Assurance

John W. Lockton

Proceedings Volume 0435, Architectures and Algorithms for Digital Image Processing; (1984) https://doi.org/10.1117/12.937009
Event: 27th Annual Technical Symposium, 1983, San Diego, United States

Abstract

A pipelined image processor has been developed to improve and analyse grey level images from electron microscopes. It uses high speed video processing techniques in an image flow system, where image data can be circulated at variable rates (DC to 10MHz) through a series of firmware processors in a recursive fashion around a digital framestore. The commercial system is proving invaluable in the quality assurance of photoresist material where such processing is revealing features not before visible with traditional techniques. This approach is of general value where standard EM methods have an adverse effect on the specimen under investigation, resulting in poor signal quality.

Citation Download Citation

John W. Lockton "High Speed Image Processing Applied to Microscopy, With Special Reference to Quality Assurance", Proc. SPIE 0435, Architectures and Algorithms for Digital Image Processing, (9 January 1984); https://doi.org/10.1117/12.937009

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