Paper
9 January 1984 High Speed Image Processing Applied to Microscopy, With Special Reference to Quality Assurance
John W. Lockton
Author Affiliations +
Abstract
A pipelined image processor has been developed to improve and analyse grey level images from electron microscopes. It uses high speed video processing techniques in an image flow system, where image data can be circulated at variable rates (DC to 10MHz) through a series of firmware processors in a recursive fashion around a digital framestore. The commercial system is proving invaluable in the quality assurance of photoresist material where such processing is revealing features not before visible with traditional techniques. This approach is of general value where standard EM methods have an adverse effect on the specimen under investigation, resulting in poor signal quality.
© (1984) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
John W. Lockton "High Speed Image Processing Applied to Microscopy, With Special Reference to Quality Assurance", Proc. SPIE 0435, Architectures and Algorithms for Digital Image Processing, (9 January 1984); https://doi.org/10.1117/12.937009
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Cited by 1 scholarly publication.
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KEYWORDS
Image processing

Photoresist materials

Video

Digital image processing

Image filtering

Video processing

Image quality

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