Hybrid and monolithic infrared detector arrays

Chris A. Van Hoof; Lars Zimmermann; Joachim John; Piet De Moor; Spyros Kavadias; Martin Gastal; Stefan Nemeth; Gustaaf Borghs; Patrick Merken

doi:10.1117/12.417784

22 February 2001 Hybrid and monolithic infrared detector arrays

Chris A. Van Hoof, Lars Zimmermann, Joachim John, Piet De Moor, Spyros Kavadias, Martin Gastal, Stefan Nemeth, Gustaaf Borghs, Patrick Merken

Author Affiliations +

Proceedings Volume 4355, Fifth International Conference on Material Science and Material Properties for Infrared Optoelectronics; (2001) https://doi.org/10.1117/12.417784
Event: Fifth International Conference on Material Science and Material Properties for Infrared Optoelectronics, 2000, Kiev, Ukraine

Abstract

Infrared detector arrays can be divided in two distinct classes: hybrid (and typically photon) detectors and monolithic (and generally thermal) detectors. Hybrid detectors involve flip-chip integration of the detector array and the readout chip, require cooling and thus cause substantial system cost. Monolithic detectors do not suffer this system overhead and most notably the microbolometer thermal detectors allow ambient operating temperature. IMEC focuses on III-V (InGaAs, InAs and InAsSb) short-wave and mid-infrared detector arrays for hybrid integration on one side and surface micromachined uncooled polySiGe microbolometer arrays on the other hand. Progress in both types of detector systems is reported.

Citation Download Citation

Chris A. Van Hoof, Lars Zimmermann, Joachim John, Piet De Moor, Spyros Kavadias, Martin Gastal, Stefan Nemeth, Gustaaf Borghs, and Patrick Merken "Hybrid and monolithic infrared detector arrays", Proc. SPIE 4355, Fifth International Conference on Material Science and Material Properties for Infrared Optoelectronics, (22 February 2001); https://doi.org/10.1117/12.417784

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