Developments In Fabrication Of Binary Optical Elements

Wilfrid B. Veldkamp; Gary J. Swanson

doi:10.1117/12.937130

26 October 1983 Developments In Fabrication Of Binary Optical Elements

Wilfrid B. Veldkamp, Gary J. Swanson

Proceedings Volume 0437, Intl Conf on Computer-Generated Holography; (1983) https://doi.org/10.1117/12.937130
Event: 27th Annual Technical Symposium, 1983, San Diego, United States

Abstract

We have produced highly efficient binary diffraction gratings -- 94% first order diffraction efficiency measured in the infrared (10.6 μm) on straight binary gratings and on binary holographic off-axis lenses. The observed point-spread functions of these lenses (F/10, f = 25 cm) were limited only by diffraction. To fabricate gratings we adapted IC production techniques. Our work brings together three independent developments: (1) theories on binary diffraction gratings operating in the EM domain, (2) large-scale integration (LSI) advances in pattern generation and substrate depositions, and (3) improvements in reactive ion-beam etching techniques.

Citation Download Citation

Wilfrid B. Veldkamp and Gary J. Swanson "Developments In Fabrication Of Binary Optical Elements", Proc. SPIE 0437, Intl Conf on Computer-Generated Holography, (26 October 1983); https://doi.org/10.1117/12.937130

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available