New actuation structure for the deformation of continuous mirrors for adaptive optics

Emmanuel Quevy; Lionel Buchaillot; Dominique Collard

doi:10.1117/12.425306

30 April 2001 New actuation structure for the deformation of continuous mirrors for adaptive optics

Emmanuel Quevy, Lionel Buchaillot, Dominique Collard

Proceedings Volume 4407, MEMS Design, Fabrication, Characterization, and Packaging; (2001) https://doi.org/10.1117/12.425306
Event: Microelectronic and MEMS Technologies, 2001, Edinburgh, United Kingdom

Abstract

This work demonstrates a novel technique for the realization and the actuation of continuous-membrane for adaptive optic applications. This original device exhibits, for the first time, both positive and negative membrane deflection with individual pixel displacement of +/- 10 micrometers , which is one order of magnitude larger than usual approaches, without diffractive interference.

Citation Download Citation

Emmanuel Quevy, Lionel Buchaillot, and Dominique Collard "New actuation structure for the deformation of continuous mirrors for adaptive optics", Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, (30 April 2001); https://doi.org/10.1117/12.425306

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