Dynamic particle removal by nanosecond dry laser cleaning: theory

Nikita Arnold; G. Schrems; T. Muehlberger; M. Bertsch; Mario Mosbacher; Paul Leiderer; Dieter Baeuerle

doi:10.1117/12.456828

25 February 2002 Dynamic particle removal by nanosecond dry laser cleaning: theory

Nikita Arnold, G. Schrems, T. Muehlberger, M. Bertsch, Mario Mosbacher, Paul Leiderer, Dieter Baeuerle

Proceedings Volume 4426, Second International Symposium on Laser Precision Microfabrication; (2002) https://doi.org/10.1117/12.456828
Event: Second International Symposium on Laser Precision Micromachining, 2001, Singapore, Singapore

Abstract

A model for ns dry laser cleaning that treats the substrate and particle expansion on a unified basis is suggested. Formulas for the time-dependent thermal expansion of the substrate, valid for temperature-dependent parameters are derived. Van der Waals adhesion, the elasticity of the substrate and particle, as well as particle inertia is taken into account for an arbitrary temporal profile of the laser pulse. Time scale related to the size of the particles and the adhesion/elastic constants is revealed. Cleaning proceeds in different regimes if the duration of the laser pulse is much shorter/longer than this characteristic time. Expressions for cleaning thresholds are provided and compared with experiments on the cleaning of Si surfaces from spherical SiO₂ particles with radii between 200 and 2585 nm in vacuum with 248 nm KrF excimer laser and 532 nm frequency doubled Nd-YAG laser. Large discrepancies between the experimental data and theoretical results for KrF laser suggest that ns dry laser cleaning cannot be explained on the basis of thermal expansion mechanism alone.

Citation Download Citation

Nikita Arnold, G. Schrems, T. Muehlberger, M. Bertsch, Mario Mosbacher, Paul Leiderer, and Dieter Baeuerle "Dynamic particle removal by nanosecond dry laser cleaning: theory", Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); https://doi.org/10.1117/12.456828

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available