Particle on the surface: basic physical problems related to laser cleaning

Boris S. Luk'yanchuk; Yuan Wei Zheng; Yongfeng Lu

doi:10.1117/12.456851

25 February 2002 Particle on the surface: basic physical problems related to laser cleaning

Boris S. Luk'yanchuk, Yuan Wei Zheng, Yongfeng Lu

Proceedings Volume 4426, Second International Symposium on Laser Precision Microfabrication; (2002) https://doi.org/10.1117/12.456851
Event: Second International Symposium on Laser Precision Micromachining, 2001, Singapore, Singapore

Abstract

In the present paper, we discuss some basic physical problems, related on the surface, i.e. optical resonance and near-field effects in laser cleaning. Another problem is the dynamics of the particle in adhesion potential. It is shown that the particle performs oscillations, which can be in principal resonantly enhanced. The analysis of thermal deformation shows that ID thermal expansion of the surface can not explain the experimental results and the 3D effects are of great importance. Some new effects arise due to the thermal contact of the particle with the surface.

Citation Download Citation

Boris S. Luk'yanchuk, Yuan Wei Zheng, and Yongfeng Lu "Particle on the surface: basic physical problems related to laser cleaning", Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); https://doi.org/10.1117/12.456851

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