Development of plasma chemical vaporization machining and elastic emission machining systems for coherent x-ray optics

Yuzo Mori; Y. Yamauchi; Kazuya Yamamura; Hidekazu Mimura; A. Saito; H. Kishimoto; Y. Sekito; Masahiko Kanaoka; Alexei Souvorov; Makina Yabashi; Kenji Tamasaku; Tetsuya Ishikawa

doi:10.1117/12.448496

14 November 2001 Development of plasma chemical vaporization machining and elastic emission machining systems for coherent x-ray optics

Yuzo Mori, Y. Yamauchi, Kazuya Yamamura, Hidekazu Mimura, A. Saito, H. Kishimoto, Y. Sekito, Masahiko Kanaoka, Alexei Souvorov, Makina Yabashi, Kenji Tamasaku, Tetsuya Ishikawa

Author Affiliations +

Proceedings Volume 4501, X-Ray Mirrors, Crystals, and Multilayers; (2001) https://doi.org/10.1117/12.448496
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

Plasma CVM (chemical vaporization machining) and EEM (elastic emission machining) systems were developed for coherent X-ray optics fabrication. Figure-correction performances were tested in the spatial wavelength range from submillimeter to several hundreds mm, and those processes were certified to be promising technique to fabricate next-generation mirrors for coherent X-ray beams. A wave-optics simulation code was also developed to feed scientific analysis back to the fabrication technology. A figure measurement technique was also proposed to satisfy the suggestions from the wave-optics simulations. Simulated results indicated the necessity of the figure measurement with subnanometer accuracy having lateral resolution more than submillimeter.

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Yuzo Mori, Y. Yamauchi, Kazuya Yamamura, Hidekazu Mimura, A. Saito, H. Kishimoto, Y. Sekito, Masahiko Kanaoka, Alexei Souvorov, Makina Yabashi, Kenji Tamasaku, and Tetsuya Ishikawa "Development of plasma chemical vaporization machining and elastic emission machining systems for coherent x-ray optics", Proc. SPIE 4501, X-Ray Mirrors, Crystals, and Multilayers, (14 November 2001); https://doi.org/10.1117/12.448496

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