Surface profile measurement of specular objects by grating projection method

Masayuki Yamamoto; Masahito Tonooka; Toru Yoshizawa

doi:10.1117/12.455240

11 February 2002 Surface profile measurement of specular objects by grating projection method

Masayuki Yamamoto, Masahito Tonooka, Toru Yoshizawa

Proceedings Volume 4567, Machine Vision and Three-Dimensional Imaging Systems for Inspection and Metrology II; (2002) https://doi.org/10.1117/12.455240
Event: Intelligent Systems and Advanced Manufacturing, 2001, Boston, MA, United States

Abstract

This paper proposes a grating projection method to measure three-dimensional profile of specular objects. This method is principally available for any reflective objects without limitation of sizes. A deformed grating pattern is observed when the reference grating is projected onto a mirror-like surface of object. This deformed pattern reflected from the surface is captured with a CCE camera and analyzed to get three-dimensional profile of the specimen. Experimental results are shown with different samples.

Citation Download Citation

Masayuki Yamamoto, Masahito Tonooka, and Toru Yoshizawa "Surface profile measurement of specular objects by grating projection method", Proc. SPIE 4567, Machine Vision and Three-Dimensional Imaging Systems for Inspection and Metrology II, (11 February 2002); https://doi.org/10.1117/12.455240

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