Paper
22 February 2002 Odor sensor using plasma-polymerized-film-coated QCM for environmental monitoring
Hidehito Nanto, Yuuki Hamaguchi, Syouji Sanada, Kenji Nobuyama, Takatoshi Matsumoto, Kazutoshi Tanabe, Shigeru Kurosawa
Author Affiliations +
Proceedings Volume 4576, Advanced Environmental Sensing Technology II; (2002) https://doi.org/10.1117/12.456964
Event: Environmental and Industrial Sensing, 2001, Boston, MA, United States
Abstract
In order to develop the sensor system for environmental monitoring, chemical sensors using quartz crystal microbalance (QCM) coated with acrylate-film with different functional groups, and styrene-film as a molecular recognition membrane are prepared using plasma-polymerized chemical vapor deposition (CVD) method. It is found that the sensor response for various gases strongly depends on the functional group of molecular recognition membrane of the sensor. The styrene-film coated sensor exhibits no selectivity for specific gas and responds to various gases. It is also found that the styrene-film coated sensor in conjunction with principal component analysis is useful for identification of gas kinds in environmental monitoring.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hidehito Nanto, Yuuki Hamaguchi, Syouji Sanada, Kenji Nobuyama, Takatoshi Matsumoto, Kazutoshi Tanabe, and Shigeru Kurosawa "Odor sensor using plasma-polymerized-film-coated QCM for environmental monitoring", Proc. SPIE 4576, Advanced Environmental Sensing Technology II, (22 February 2002); https://doi.org/10.1117/12.456964
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Cited by 2 scholarly publications.
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KEYWORDS
Sensors

Gases

Gas sensors

Chemical vapor deposition

Environmental monitoring

Principal component analysis

Plasma

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