Straightness measurement of a moving table using laser beams and quadrant PSDs

Koji Tenjimbayashi

doi:10.1117/12.463428

24 April 2002 Straightness measurement of a moving table using laser beams and quadrant PSDs

Koji Tenjimbayashi

Proceedings Volume 4669, Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications III; (2002) https://doi.org/10.1117/12.463428
Event: Electronic Imaging, 2002, San Jose, California, United States

Abstract

The straightness of a moving table consists of three rotation angle errors and two lateral displacement errors. It is well known that two lateral displacement errors can be measured by using one corner cube mirror. We have already shown theoretically that three rotation angle errors an be measured by two pairs of parallel mirrors. This paper discusses the experiment of rotation angle error measurement and shows the method is useful.

Citation Download Citation

Koji Tenjimbayashi "Straightness measurement of a moving table using laser beams and quadrant PSDs", Proc. SPIE 4669, Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications III, (24 April 2002); https://doi.org/10.1117/12.463428

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available