Experimental study on ceramics processing by using high-power CO2 laser beam

Atsuki Yamamoto; Hiroyuki Hayashikawa; Hitoshi Hongu

doi:10.1117/12.486557

19 February 2003 Experimental study on ceramics processing by using high-power CO₂ laser beam

Atsuki Yamamoto, Hiroyuki Hayashikawa, Hitoshi Hongu

Proceedings Volume 4830, Third International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.486557
Event: LAMP 2002: International Congress on Laser Advanced Materials Processing, 2002, Osaka, Japan

Abstract

This paper makes a report on the results of experimental analyses about the relation between drilling performance about alumina ceramics and focusing characteristics, as first step for clarifying of drilling mechanism of ceramics by CO₂ laser. The results are as follows: · (1) When the focal point is set inside of the work, the shape of holes is made 50 to 55% deeper and 10 to 15% smaller than these when the focal point is set outside of the work. (The distance between work surface and focal point is +/-0.2mm.) It seems to be able to concentrate higher energy when the focal point is set inside of the work. · (2) Spot diameter under 95 μm with the focusing angle (7.5-8 degrees) is necessary to make deep holes. was clarified. From this, it seems that to make deep holes does not only need higher energy density, but also need smooth elimination of molten work. The result of these analyses was applied to new scribing system to develop scribing performance. The scribing speed of alumina ceramics was improved by 20%.

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Atsuki Yamamoto, Hiroyuki Hayashikawa, and Hitoshi Hongu "Experimental study on ceramics processing by using high-power CO₂ laser beam", Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); https://doi.org/10.1117/12.486557

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