Determination of the absolute contours of optical flats using Zernike phase contrast method

Alexander A. Malyutin

doi:10.1117/12.484463

29 July 2002 Determination of the absolute contours of optical flats using Zernike phase contrast method

Alexander A. Malyutin

Proceedings Volume 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life; (2002) https://doi.org/10.1117/12.484463
Event: Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, 2002, Novosibirsk, Russian Federation

Abstract

A procedure is described that employs Zemike phase contrast method for the measurements of small departures of the optical surfaces from flatness. Numerical modeling is carried out to demonstrate the ability of the method to achieve a ?/1000 measurement sensitivity using an optical system exhibiting a much lower optical quality.

Citation Download Citation

Alexander A. Malyutin "Determination of the absolute contours of optical flats using Zernike phase contrast method", Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); https://doi.org/10.1117/12.484463

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