Fabrication of 1.3-um Si-based MEMS tunable optical filter

Yuhua Zuo; Changjun Huang; Buwen Cheng; Rongwei Mao; Liping Luo; Junhua Gao; Y. X. Bai; Liangchen Wang; Jinzhong Yu; Qiming Wang

doi:10.1117/12.483151

10 September 2002 Fabrication of 1.3-μm Si-based MEMS tunable optical filter

Yuhua Zuo, Changjun Huang, Buwen Cheng, Rongwei Mao, Liping Luo, Junhua Gao, Y. X. Bai, Liangchen Wang, Jinzhong Yu, Qiming Wang

Author Affiliations +

Proceedings Volume 4928, MEMS/MOEMS Technologies and Applications; (2002) https://doi.org/10.1117/12.483151
Event: Photonics Asia, 2002, Shanghai, China

Abstract

In this paper we report the fabrication of 1.3µm Si-based MEMS tunable optical filter, by surface micromaching. Through wet etching of polyimide sacrificial layer, a tunable Fabry-Perot filter was successfully fabricated. We make the capacitance measurement of the prototype device, compare the experimental curve with the theoretical one, and explain the difference between them.

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Yuhua Zuo, Changjun Huang, Buwen Cheng, Rongwei Mao, Liping Luo, Junhua Gao, Y. X. Bai, Liangchen Wang, Jinzhong Yu, and Qiming Wang "Fabrication of 1.3-μm Si-based MEMS tunable optical filter", Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); https://doi.org/10.1117/12.483151

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