Simulation and optimization of dynamic passive valve micropump

Weiping Zhang; Wenyuan Chen; Xiaomei Chen; Xiaosheng Wu; Zhengfu Xu

doi:10.1117/12.483187

10 September 2002 Simulation and optimization of dynamic passive valve micropump

Weiping Zhang, Wenyuan Chen, Xiaomei Chen, Xiaosheng Wu, Zhengfu Xu

Author Affiliations +

Proceedings Volume 4928, MEMS/MOEMS Technologies and Applications; (2002) https://doi.org/10.1117/12.483187
Event: Photonics Asia, 2002, Shanghai, China

Abstract

Dynamic passive valve micropump is a kind of PZT actuation, valveless micropump which has higher working frequency, high reliability, simple structure, low cost. It can easily match many kinds of requirement in application. Some micropumps have been fabricated in our laboratory. The performance of dynamic passive valve micropump is in close relationship with structural parameters such as diffuser's aperture angle, diffuser's channel length, diffuser's channel smallest cross-section diameter. At the same time, its performance also depends on the fluid' s Reynolds number and the working frequency of PZT actuation as well. In this paper, firstly we give the relationship between the performance of the micropump and these parameters. Then we build a micro hydrodynamic model of micro pump by the finite element method. In this model, we take the coupling of fluid in micro chamber and two micro valves into consideration. The restriction of micro fabrication is also considered. By simulation and computation, we obtained the fluid status such as laminar flow, turbulent flow. We also get the fluid motion status such velocity of flow, the direction of the current. By some calculation, we gain the flux of micropump. Based on these results, one optimization design of micropump is attained. And according to this design, we fabricated and assembled some samples of dynamic passive micropump.

Citation Download Citation

Weiping Zhang, Wenyuan Chen, Xiaomei Chen, Xiaosheng Wu, and Zhengfu Xu "Simulation and optimization of dynamic passive valve micropump", Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); https://doi.org/10.1117/12.483187

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KEYWORDS

Diffusers

Microfluidics

Fluid dynamics

Semiconducting wafers

Silicon

Ferroelectric materials

Photomasks

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